Atelier InterUniversitaire de Micro-nano Électronique

Content of the summer school MINATO

AIME provides a unique platform for students to experience technology with more than 400 m2 clean room and an ensemble of equipments to manufacture, characterize and test micro and nano devices.

AIME Virtual Visit – select AIME in the menu

Lab Work

  • Microelectronics – MOS (metal oxide semiconductor) technology (elementary components, diode, transistor, integrated circuits)
  • Energy : integrated energy harvesting (solar cell) and storage (micro-supercondensator) technologies
  • Nano – Chemistry : chemical sensors based on metal oxide semi-conductors nano-objects
  • Nano – Physics : remarkable properties of devices integrating 2D materials (graphene, …)
  • Quantum technologies : ultrasensitive sensors and quantum cryptography* (*only for 4 weeks program)
  • + French as foreign language and more !

Track 1: Microelectronics – MOS (metal oxide semiconductor) technology

  • Starting from a virign wafer, realize all the opertation to obtain fully operational NMOS transistor.
  • Characterize your own components (resistor, capacitor, diode, transistor) and integrated circuits.
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Microelectronics – MOS technology (5 days)

This practical workshop will provide a complete, theoretical and practical approach to the fundamental manufacturing operations of a silicon integrated circuits using NMOS transistor technology. In the AIME clean room, the trainees carry out all the technological operations of the manufacturing process starting from a virgin silicon wafer up to obtaining a functional transistor component and integrated circuits. Theoretical aspects on the different techniques (chemistry, wafer surface cleaning, photolithography, silicon oxidation, deposition and etching, diffusion, etc.) will be detailed during each stage of manufacturing.  Additionally, this workshop will give an approach to the Cadence software to acquire the basic notions of designing integrated circuit. The participants will develop schematic design of simple analog circuits, circuit simulation and their first circuit layout design

Reference: From design to fabrication of integrated circuits in CMOS technologie. J3eA, 18, 1019. https://doi.org/10.1051/j3ea/20191019

Wafer in HF buffer

Track 2: Energy – integrated energy harvesting (solar cell) and storage (micro-supercondensator) technologies

  • Realize all the technical operation to obtain a fonctionning solar cell and supercapacitor starting from a virgin silicon wafer..
  • Caracterize both devices
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Integrated energy harvesting and storage technologies (5 days)

This training will be split into two parts, providing a complete, theoretical and practical approach to the manufacturing and electrochemical characterization of solar cell and supercapacitor for Integrated energy harvesting and storage technologies respectively. First, starting from a virgin silicon wafer, the participants will carry out all the technological operations of the manufacturing process of their centimetric solar cell in single crystalline Si. Photocurrent measurements and Solar cell yield will be measured using a solar simulator. Second, starting from a virgin silicon wafer, the participants will carry out all the technological operations of the manufacturing process of their micrometric supercapacitor based on activated nano-structured carbon. Different technological and scientific fields are concerned: i/ the manufacturing of chips supporting current collectors using conventional microelectronics processes, ii/ selected area deposit of activated carbon electrodes on current collectors (thin layer deposition by electrophoresis), iii/ electrochemical characterization of micro-supercapacitors (by cyclo-voltametry).

Reference : Practical Works on Nanotechnology: Middle School to Undergraduate Students. IEEE Nanotechnology Magazine, 14(4), 21–28. https://doi.org/10.1109/MNANO.2020.2994822

Track 3: Nano-Chemistry – chemical sensors based on metal oxide semi-conductors nano-objects

  • Realize all the technical operation to obtain a fonctionning sensor starting from a virgin silicon wafer.
  • Do your own chemical nanowires synthesis as gas sensitive material
  • Gaz sensitivity measurement and testing
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Nanochemistry – Chemical sensors (5 days)

This training will provide a theoretical and practical approach, with a strong interdisciplinary character (chemistry, physics, technology), covering the scientific and technological fields via the manufacturing and characterization of chemical sensors, in a clean room environment (AIME). Starting from a virgin silicon wafer, participants will carry out all the technological operations of the manufacturing process as well as the characterization tests. A Si based chip with integrated heater will be first manufactured by the trainees using microtechnology techniques. As a sensitive material, they will carry out the bottom-up chemical synthesis of metal oxide nanowires. The sensor is manufactured by integrating the nanoparticles onto the chips. Finally, participants will measure the response of their sensor in controlled polluted atmospheres, in order to determine its sensitivity.

Reference :

Nanoparticles-based gas sensor : chemical synthesis of nano-objects, integration and characterization of engineered sensors
in a clean room. J3eA, 16, 1022. https://doi.org/10.1051/j3ea/20171022

JEOL SEM-FEG

Track 4: Nano-Physics – remarkable properties of devices integrating 2D materials (graphene, …)

  • Transfer and connect 2D Materials
  • Perform electrical and optical characterization of the 2D materials
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Nanophysics- 2D Materials (5 days)

This practical workshop will introduce students to two-dimensional systems based on van der Waals materials such as graphene (semi-metal), transition metal dichalcogenides such as MoS2, or WSe2 (semiconductor) and hexagonal boron nitride (insulator). The theoretical and practical aspects of 2D material will be covered during the workshop, with a focus on their electronic and optical properties as well as their potential applications. First, students will be trained in the famous scotch tape based mechanical exfoliation technique, which enables a monolayer of 2D materials to be transferred from a bulk crystal to a substrate, usually made of silicon and silicon oxide.  Secondly, the students will use electronic beam lithography to electrically connect the 2D material transferred onto the substrate, with the aim of measuring the electrical resistance of the layer or tuning its electronic doping. Finally, they will perform electrical and optical characterization of the 2D materials, first at room temperature using an electrical probe station, then at low temperature (4K) an under magnetic field in a He-cryostat, in order to probe the outstanding electronic and optical properties of this new class of materials.

Track 5: Quantum Technologies – ultrasensitive sensors and quantum cryptography

  • Basics of optics and Instrumentation for quantum technologies
  • Fundamental experiences of quantum mechanics
  • Apply to sensors and quantum cryptography
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Quantum Technologies – Practical Applications: Sensors, Secure Communication, etc.

Designing sensors with record sensitivities, communicating information in an ultra-secure way using the rules of quantum mechanics, a real breakthrough quantum technologies open up particularly promising application prospects. Quantum computing aims to use the ultimate quantum properties of matter (superposition, entanglement and non-locality) to perform massive operations on data using the quantum computer.

 This training gives a complete and original approach to quantum technologies, leaving room for a large practical part. After a brief introduction to the fundamental concepts of quantum superposition and entanglement, you will be able to reproduce two major applications of current quantum technologies.

  • Practical Workshop 1 : Communication according to the BB84 quantum cryptography protocol. (5h)
  • The objective is to perform a quantum key distribution and simulate an attack. You will have the opportunity to implement the BB84 protocol in quantum cryptography, but also on the properties of photons, instrumentation (source, optical fiber, detector, etc.). Finally, you will be able to perform a quantum entanglement experiment on a pair of twin photons that earned the 2022 Nobel Prize in Physics awarded to Alain Aspect, John Clauser and Anton Zeilinger.

  • Practical Workshop 2: Metrology – Ultra-weak magnetic field sensors thanks to a quantum sensor based on nitrogenous defects in diamonds. (5h).
  • You will implement three magnetic field sensor technologies: Hall effect, GMR (Giant Magnetoresistance), and a quantum sensor based on the N-V centers of the diamond. The relevant technical characteristics of each technology will be reviewed, including measurement ranges and sensitivity.

Laser Technologies Quantiques

French track : French lecture and cultural discovery

  • Discover French language with dedicated lectures
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FLE course (12h)

  • To present yourself
  • Talk about yourself (tastes, hobbies, family)
  • Talk about everyday life (shopping, transportation)
  • Go out (to a restaurant, invitation)
  • French culture (8h)
  • Symbols and clichés
  • Eating habits and gastronomy
  • Leisure in France: games, sport, culture
  • Festivities and rituals

Media

  • Games, videos, posters, songs, photos, leaflets, etc.